CVD/CVI
C series Laboratory Chemical Vapor Deposition Furnace (CVD/CVI)
C series Laboratory Chemical Vapor Deposition Furnace (CVD/CVI)
High Equipment Stability / Good Temperature Uniformity / Fast Heating Speed / High Control Accuracy / Good Safety Performance Thermal induced chemical vapor dep...
Key Features
Technical Highlights
High Equipment Stability / Good Temperature Uniformity / Fast Heating Speed / High Control Accuracy / Good Safety Performance
Adopting a vertical, bottom/top door opening structure: high loading and unloading accuracy, easy operation;
Adopting advanced control technology, it can precisely control the flow and pressure of MTS, stabilize the sedimentation air flow in the furnace, and have a small range of pressure fluctuations;
Good safety performance: Adopting HMI+PLC+PID pressure sensing control, safe and reliable;
Selection guide
Confirm the process window before quotation.
For faster engineering review, prepare the core process boundaries before sending an inquiry.
Can the chamber be customized?
Yes. Chamber size, heating zone, fixture, pressure, and atmosphere configuration should be confirmed through technical review.
Is a process test recommended?
For new materials or demanding density targets, a sample process discussion helps reduce equipment selection risk.
What should be sent with an inquiry?
Material, target temperature, pressure or load, atmosphere, workpiece size, and expected capacity are the most useful inputs.
Official Specification Tables
Imported from Haoyue's official product data and reorganized for clearer technical review.
| Series | No. | Operating Temperature (℃) | Heater | Chamber Size （mm） | External Dimentions （mm） | Ultimate Vacuum （Pa） | Application |
|---|---|---|---|---|---|---|---|
| C2 Deposision Furnace | C2GR16 | 1600 | Graphite resistor | 200×200×300 | 1425×1550×1850 | 6.7×10-3 | CVD/CVI |
Typical Applications
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High Equipment Stability / Good Temperature Uniformity / Fast Heating Speed / High Control Accuracy / Good Safety Performance Thermal induced chemical vapor dep...
Gallery And Media
Review product images, equipment details, and available media before sending a technical inquiry.
Equipment Video
Equipment overview videos and process demonstrations are available on request when a public video is not yet attached to this product page.
Technical Downloads
C series Laboratory Chemical Vapor Deposition Furnace (CVD/CVI) Technical Inquiry Sheet
Prepared placeholder for future downloadable product documentation.